The chemistry of the semiconductor industry

被引：0
|
作者：
OBrien, SC
机构：
来源：
CHEMICAL SOCIETY REVIEWS | 1996年 / 25卷 / 06期
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
The explosive growth of the semiconductor industry can be directly related to inexpensive ultraclean chemical processing which leads to highly controlled films and surfaces. This article concentrates on the field of contamination and film removal using liquid and gas phase chemical reactions. This area more than any other is in desperate need of fundamental chemical study to determine reaction kinetics, and mechanisms.
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页码：393 / &
页数：9
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