The gas-dynamic synthesis of diamond by thermal activation

被引：11
|
作者：
Emelyanov, Alexei [1 ]
Rebrov, Aleksey [1 ]
Yudin, Ivan [1 ]
机构：
[1] SB RAS, Kutateladze Inst Thermophys, Novosibirsk 630090, Russia
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2014年 / 211卷 / 10期
关键词：
diamond; gas dynamics; synthesis; CHEMICAL-VAPOR-DEPOSITION; RAREFIED-GAS; FLOW; SURFACE; GROWTH; FILMS;
D O I：
10.1002/pssa.201431175
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The study presents results on deposition of diamond structures from high-velocity flows of carbon-containing a gas mixture activated by hot surfaces. Important problems were solved by creation of the reactor using a spiral of heat-resistant material, inserted into the chamber with an inlet nozzle. The possibilities of diamond synthesis in wide parameters ranges (pressure from 10(-4) to 100Torr, flow rates from 500 to 3000sccm, substrate temperature from 1100 to 1600K) have been studied experimentally. For analysis of the hydrogen flow, the direct simulation Monte Carlo (DSMC) method was used. The activation-deactivation influence of reactor surfaces has been taken into account. The results of diamond crystal synthesis are presented for the cases of joint and separated H-2 and CH4 gas delivery. Due to retaining the catalytic tungsten properties in the case of separated gas delivery, an increasing growth rate of diamond crystals was discovered. (C) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码：2279 / 2283
页数：5
相关论文
共 50 条
  • [1] THERMAL GAS-DYNAMIC SEPARATOR
    Zaporozhets, E. P.
    Zibert, G. K.
    Zibert, A. G.
    CHEMICAL AND PETROLEUM ENGINEERING, 2011, 46 (9-10) : 585 - 593
  • [2] THERMAL SPUTTERING AS A GAS-DYNAMIC PROCESS
    KELLY, R
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 46 (1-4): : 441 - 447
  • [3] Investigation of plasma jet gas-dynamic effect on a substrate in conditions of diamond coating synthesis
    Vasil'ev, VV
    Strel'nitskij, VE
    DIAMOND AND RELATED MATERIALS, 1999, 8 (2-5) : 202 - 206
  • [4] GAS-DYNAMIC THERMAL-BLOOMING REGIMES
    KOGAN, MN
    KUCHEROV, AN
    DOKLADY AKADEMII NAUK SSSR, 1980, 251 (03): : 575 - 577
  • [5] THERMAL GAS-DYNAMIC LASERS, BASED ON PARTIAL INVERSION
    ORAEVSKII, AN
    RODIONOV, NB
    SHCHEGLOV, VA
    ZHURNAL TEKHNICHESKOI FIZIKI, 1978, 48 (07): : 1432 - 1441
  • [6] ELECTRICAL GAS-DYNAMIC LASERS WITH THERMAL IONIZATION.
    Biryukov, A.S.
    Marchenko, V.M.
    Shelepin, L.A.
    1977, 83 : 89 - 102
  • [7] Modelling of Thermal and Gas-Dynamic Processes in the Porous Structures
    Gaynullin, M. N.
    Sotova, V. A.
    Chertykovtsev, P. A.
    Barbonov, E. O.
    Zaika, S. V.
    2017 INTERNATIONAL CONFERENCE ON MECHANICAL, AERONAUTICAL AND AUTOMOTIVE ENGINEERING (ICMAA 2017), 2017, 108
  • [8] Thermal State of the Package of Cooled Gas-Dynamic Microlasers
    Formalev, Vladimir F.
    Bulychev, Nikolay A.
    Kolesnik, Sergey A.
    Kazaryan, Mishik A.
    XIV INTERNATIONAL CONFERENCE ON PULSED LASERS AND LASER APPLICATIONS, 2019, 11322
  • [9] OPTICAL AND GAS-DYNAMIC MEASUREMENTS IN A MICROWAVE DISCHARGE PLASMA FLOW UNDER CONDITIONS OF GAS-JET SYNTHESIS OF DIAMOND
    A. A. Emelyanov
    V. A. Pinaev
    M. Yu. Plotnikov
    A. K. Rebrov
    N. I. Timoshenko
    I. B. Yudin
    Journal of Applied Mechanics and Technical Physics, 2022, 63 : 418 - 424
  • [10] OPTICAL AND GAS-DYNAMIC MEASUREMENTS IN A MICROWAVE DISCHARGE PLASMA FLOW UNDER CONDITIONS OF GAS-JET SYNTHESIS OF DIAMOND
    Emelyanov, A. A.
    Pinaev, V. A.
    Plotnikov, M. Yu
    Rebrov, A. K.
    Timoshenko, N., I
    Yudin, I. B.
    JOURNAL OF APPLIED MECHANICS AND TECHNICAL PHYSICS, 2022, 63 (03) : 418 - 424
12345