Development of mathematical models of micromechanical devices

The article is devoted to the temperature error of micromechanical accelerometers, as well as the development of structural and technological solutions to improve the accuracy parameters of micromechanical devices, primarily the stabilization of output parameters. To reduce the error, a number of methodologies and design and technological solutions were developed that helped to improve accuracy, i.e. reduce temperature error. Analytical methods for estimating errors, methods for analyzing the effect of temperature on a measuring circuit and identifying elements that lead to a distortion of the measuring function of conversion were considered. Different types of errors were considered. Used statistical methods. Calibration issues considered. The proposed techniques can significantly improve the accuracy of determining the error model coefficients, as a result of which a more accurate accelerometer calibration is obtained. The use of the algorithmic component has significantly reduced the effect of temperature on the output signals.