Conoscopic interferometry of wafers for surface-acoustic wave devices

被引:0
|
作者
Ayras, P [1 ]
Friberg, AT [1 ]
Kaivola, M [1 ]
Salomaa, MM [1 ]
机构
[1] TECH UNIV BERLIN,INST OPT,D-10623 BERLIN,GERMANY
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O59 [应用物理学];
学科分类号
摘要
We show that in interpreting the: conoscopic interference fringes, one should exercise care in employing approximate expressions which fail for certain crystal cuts. In this paper, we study 64 degrees- and 128 degrees-rotated Y-cut and Z-cut LiNbO3 wafers. We show that the error made in using the approximate formulae for the sam!les is more than 25% and that one has to use exact formulae in order to attain quantitative agreement with the experimental data. (C) 1997 American Institute of Physics.
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页码:4039 / 4042
页数:4
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