Measurements of electron-impact-dissociation cross section for neutral products

被引：0

作者：

Sugai, H ^{[1
]}

Toyoda, H ^{[1
]}

机构：

[1] Nagoya Univ, Dept Elect Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

PHYSICS OF ELECTRONIC AND ATOMIC COLLISIONS | 2000年 / 500卷

关键词：

D O I：

暂无

中图分类号：

O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

摘要：

Neutral radicals play key roles in plasma CVD and etching, and a comprehensive data base is needed on electron-impact-dissociation cross section for neutral radical production. This paper reviews the: direct measurement of the neutral dissociation cross section accomplished by using appearance mass spectrometry in a dual-electron-beam system. The collision energy dependence of neutral dissociation cross sections is investigated for typical molecules used for plasma processing; CH4, CF4, CHF3, C4F8, SF6, SiF4 and so on.

引用

页码：349 / 358

页数：10

共 50 条

[1] CROSS-SECTION MEASUREMENTS FOR ELECTRON-IMPACT DISSOCIATION OF SIF(4) INTO NEUTRAL RADICALS
NAKANO, T
SUGAI, H
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (11) : 1909 - 1915
[2] CROSS-SECTION MEASUREMENTS FOR ELECTRON-IMPACT DISSOCIATION OF CHF3 INTO NEUTRAL AND IONIC RADICALS
GOTO, M
NAKAMURA, K
TOYODA, H
SUGAI, H
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (6A): : 3602 - 3607
[3] Neutral dissociation of methane by electron impact and a complete and consistent cross section set
Bouwman, Dennis
Martinez, Andy
Braams, Bastiaan J.
Ebert, Ute
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2021, 30 (07):
[4] Cross section measurements for electron-impact dissociation of C4F8 into neutral and ionic radicals
Toyoda, H
Iio, M
Sugai, H
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (6A): : 3730 - 3735
[5] Electron-ion coincidence measurements:: The neutral dissociation cross section for CF4
Mi, L
Bonham, RA
JOURNAL OF CHEMICAL PHYSICS, 1998, 108 (05): : 1910 - 1914
[6] Electron-ion coincidence measurements:: The neutral dissociation plus excitation cross section for N2
Mi, L
Bonham, RA
JOURNAL OF CHEMICAL PHYSICS, 1998, 108 (05): : 1904 - 1909
[7] CROSS-SECTION FOR THE DISSOCIATION OF AMMONIA BY ELECTRON-IMPACT
SLOVETSKII, DI
URBAS, AD
HIGH ENERGY CHEMISTRY, 1979, 13 (05) : 400 - 401
[8] A PROPOSED METHOD FOR ELECTRON IMPACT INELASTIC CROSS-SECTION MEASUREMENTS
KUREPA, JM
KUREPA, MV
INTERNATIONAL JOURNAL OF ELECTRONICS, 1965, 18 (02) : 115 - &
[9] CROSS-SECTION MEASUREMENTS FOR ELECTRON-IMPACT IONIZATION OF ATOMS
FREUND, RS
WETZEL, RC
SHUL, RJ
HAYES, TR
PHYSICAL REVIEW A, 1990, 41 (07): : 3575 - 3595
[10] Partial cross sections for electron impact dissociation of CF4 into neutral radicals
Nakano, Tohru, 1600, (31):

← 1 2 3 4 5 →