Corrosion measurements on thin-film disks using optical surface analysis

被引:1
|
作者
Cheng, T
Lazik, C
Chao, J
Velidandla, V
Meeks, SW
Oak, D
机构
[1] Komag Inc, Fremont, CA 94538 USA
[2] Candela Instruments, Fremont, CA 94538 USA
关键词
cobalt oxides; nickel oxides; optical surface analysis; thin-film disks;
D O I
10.5006/1.3277630
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The diminishing thickness of the carbon overcoat layer on a thin-film magnetic storage disk results in a greater susceptibility to corrosion and a need to move toward a fast and reliable corrosion analysis technique. A new method for quantifying corrosion levels on thin-film disks has been developed using an optical surface analyzer (OSA). High- and low-corrosion-level disks were used to develop and verify the necessary algorithms for surface analysts. The results from OSA were referenced to established methods such as scanning electron microscopy (SEM), scanning Auger microscopy (SAM), and ion chromatography (IC) wash techniques, A reliable method for identifying nickel- and cobalt-based corrosion and for separating corrosion from debris was developed. The OSA proved to be a faster and more sensitive corrosion detection technique than SAM.
引用
收藏
页码:408 / 416
页数:9
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