Water adsorption properties of amorphous BaTiO3 thin films

被引：26
|
作者：
Chornik, B [1 ]
Fuenzalida, VA [1 ]
Grahmann, CR [1 ]
Labbe, R [1 ]
机构：
[1] UNIV SANTIAGO,DEPT FIS,SANTIAGO 2,CHILE
来源：
VACUUM | 1997年 / 48卷 / 02期
关键词：
D O I：
10.1016/S0042-207X(96)00249-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Amorphous barium titanate films were flash evaporated on silicon and studied with X-ray photoelectron spectroscopy. After water adsorption, the surface oxygen Is photoelectron peak reveals the presence of hydroxyl groups. A thermal desorption experiment on a similar thin film evaporated on rhenium shows one peak of water partial pressure at abo ut 480 K, wh ich decreases after repeated cycles of adsorption and thermal desorption, suggesting that oxygen vacancies are filled up during desorption. (C) 1997 Elsevier Science Ltd.
引用
收藏
页码：161 / 164
页数：4
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