X-ray diffraction peaks at glancing incidence and glancing exit from highly mismatched epitaxial layers

被引:10
|
作者
Kaganer, V. M.
Shalimov, A.
Bak-Misiuk, J.
Ploog, K. H.
机构
[1] Paul Drude Inst Festkorperelekt, D-10117 Berlin, Germany
[2] Polish Acad Sci, Inst Phys, PL-02668 Warsaw, Poland
关键词
D O I
10.1063/1.2221885
中图分类号
O59 [应用物理学];
学科分类号
摘要
We find that the widths of double-crystal x-ray diffraction peaks in asymmetric reflections of relaxed GaAs/Si(001) heteroepitaxial layers in reciprocal diffraction geometries (glancing incidence and glancing exit) are notably different. This observation is in agreement with previous measurements on other heteroepitaxial systems but apparently contradicts the reciprocity principle of electrodynamics. We show that the apparent contradiction originates from the summation of the scattered waves that are collected by the detector in a double-crystal setup and resolve it by giving an appropriate description of the peak widths. (c) 2006 American Institute of Physics.
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页数:3
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