Proceedings of the 14th Symposium on Plasma Science for Materials (SPSM-14) - Tokyo, Japan, 13-14 June 2001 - Preface

被引：0

作者：

Kono, A ^{[1
]}

Ishigaki, T

Sakuta, T

Samukawa, S

Terashima, K

机构：

[1] Nagoya Univ, Nagoya, Aichi, Japan

[2] Kanazawa Univ, Kanazawa, Ishikawa 920, Japan

[3] Tohoku Univ, Sendai, Miyagi 980, Japan

[4] Univ Tokyo, Tokyo, Japan

来源：

THIN SOLID FILMS | 2002年 / 407卷 / 1-2期

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：IX / IX

页数：1

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