Synthesis and Properties of Silicon Carbide Nanoparticles Obtained by the Laser Pyrolysis of a Mixture of Monosilane and Acetylene

被引：1

作者：

Ershov, I. A. ^{[1
]}

Pustovoy, V., I ^{[1
]}

Krasovskii, V., I ^{[1
]}

Orlov, A. N. ^{[1
]}

Rasmagin, S., I ^{[1
]}

Iskhakova, L. D. ^{[1
]}

Milovich, F. O. ^{[1
]}

Kirichenko, M. N. ^{[2
]}

Chaikov, L. L. ^{[2
]}

Konstantinova, E. A. ^{[3
,4
]}

机构：

[1] Russian Acad Sci, Prokhorov Gen Phys Inst, Moscow 119991, Russia

[2] Russian Acad Sci, Lebedev Phys Inst, Moscow 119991, Russia

[3] Moscow MV Lomonosov State Univ, Fac Phys, Moscow 19991, Russia

[4] Natl Res Ctr Kurchatov Inst, Moscow 123182, Russia

来源：

INORGANIC MATERIALS-APPLIED RESEARCH | 2022年 / 13卷 / 03期

基金：

俄罗斯基础研究基金会;

关键词：

silicon carbide nanoparticles; spin state; pyrolysis; nanoparticle synthesis; PHYSICAL VAPOR TRANSPORT; GROWTH; DISSOCIATION; DEPENDENCE; PARTICLES; SF6;

D O I：

10.1134/S207511332203011X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The conditions for the synthesis of silicon carbide nanoparticles in a SiH4/C2H2/Ar/He gas mixture using 10.6 mu m CO2 laser radiation are determined. The laser synthesis of SiC samples observed with SiH4/C2H2 gas flow rate in the range of 1.6-3.2. The temperature in the reaction area was about 1400-1500 degrees C. Silicon carbide nanoparticles similar to 6 nm diameter were obtained and their composition was studied.

引用

页码：775 / 780

页数：6

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