Wide-angle far-field line generation with diffractive optics

被引：1

作者：

Lautanen, J ^{[1
]}

Honkanen, M ^{[1
]}

Kettunen, V ^{[1
]}

Kuittinen, M ^{[1
]}

Laakkonen, P ^{[1
]}

Turunen, J ^{[1
]}

机构：

[1] Univ Joensuu, Dept Phys, FIN-80101 Joensuu, Finland

来源：

OPTICS COMMUNICATIONS | 2000年 / 176卷 / 4-6期

基金：

芬兰科学院;

关键词：

D O I：

10.1016/S0030-4018(00)00507-1

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Wide-angle far-field line generation using a simple optical system consisting of a cylindrical lens and a resonance-domain diffractive beam-shaping element is proposed. The desired intensity distribution is realized as a local average of the coherent superposition of the component fields in different diffraction orders of a multiple-beam-splitter grating with nanoscale transverse features. Fabrication tolerances of the proposed method are investigated and the system is demonstrated experimentally using electron beam lithography and reactive ion etching. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：273 / 280

页数：8

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