Fabrication of submicron structures by three-dimensional laser lithography

被引：8
|
作者：
Shishkin, I. I. [1 ,2 ]
Rybin, M. V. [1 ,2 ]
Samusev, K. B. [1 ,2 ]
Limonov, M. F. [1 ,2 ]
Kiyan, R. V. [3 ]
Chichkov, B. N. [3 ]
Kivshar', Yu. S. [1 ,4 ]
Belov, P. A. [1 ]
机构：
[1] ITMO Univ, St Petersburg 197101, Russia
[2] Russian Acad Sci, AF Ioffe Phys Tech Inst, St Petersburg 194021, Russia
[3] Laser Zentrum Hannover eV, D-30419 Hannover, Germany
[4] Australian Natl Univ, Nonlinear Phys Ctr, Canberra, ACT 0200, Australia
来源：
JETP LETTERS | 2014年 / 99卷 / 09期
基金：
俄罗斯基础研究基金会;
关键词：
2-PHOTON POLYMERIZATION;
D O I：
10.1134/S0021364014090112
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with "woodpile" structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.
引用
收藏
页码：531 / 534
页数：4
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