Comparative study on structural and optical properties of ZnO thin films prepared by PLD using ZnO powder target and ceramic target

被引：50
|
作者：
Wei, X. Q. [1 ]
Zhang, Z. [1 ]
Yu, Y. X. [2 ]
Man, B. Y. [3 ]
机构：
[1] Univ Jinan, Sch Sci, Jinan 250022, Peoples R China
[2] Shandong Educ Coll, Dept Phys, Jinan 250013, Peoples R China
[3] Shandong Normal Univ, Coll Phys & Elect, Jinan 250014, Peoples R China
来源：
OPTICS AND LASER TECHNOLOGY | 2009年 / 41卷 / 05期
基金：
中国国家自然科学基金;
关键词：
PLO; ZnO thin films; Optical properties; PULSED-LASER DEPOSITION; LUMINESCENT CENTER; PHOTOLUMINESCENCE; CARBON;
D O I：
10.1016/j.optlastec.2008.11.009
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Zinc oxide thin films have been obtained in O-2 ambient at a pressure of 1.3 Pa by pulsed laser deposition (PLD) using ZnO powder target and ceramic target. The effect of temperature on structural and optical properties of ZnO thin films was investigated systematically by XRD, SEM, MR and PL spectra. The results show that the best structural and optical properties can be achieved for ZnO thin film fabricated at 700 degrees C using powder target and at 400 degrees C using ceramic target, respectively. The PL spectrum reveals that the efficiency of UV emission of ZnO, thin film fabricated by using powder target is low, and the defect emission of ZnO thin film derived from Zn-i and O-i is high. (c) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码：530 / 534
页数：5
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