A novel current-mode actuator driver for enhanced piezoelectric reliability

被引:0
|
作者
Kinzel, Bernadette [1 ,2 ]
Vanselow, Frank [1 ]
Isa, Erkan [1 ]
Maurer, Linus [1 ,2 ]
机构
[1] Fraunhofer Res Inst Microsyst & Solid State Techo, Munich, Germany
[2] Univ Bundeswehr, Dept Circuit Design, Neubiberg, Germany
基金
欧盟地平线“2020”;
关键词
DC/DC Converter; Micropump Driver; Low-Power Loads; Piezoelectric Driver; Piezoelectric Reliability; High-Voltage Driver; DCM Operation;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we present a novel, piezoelectric actuator driver topology that combines high-voltage actuator driving in the range of -50 V- to +100 V with piezoelectric reliability. The output waveform is generated by a novel capacitor clamping circuit (patent# PCT/EP2016/066134) with programmable rise-and fall times implemented in a 0.35 um high-voltage bulk CMOS technology optimized for capacitive light-load (2 nF- to 8 nF) operation. The novel piezoelectric actuator driver consists of a negative voltage generator and a degradation regulator integrated onto a single chip. The smart driver electronics is optimized towards reliable piezoelectric operation by taking fatigue and electrical overstress into account. The novel piezoelectric actuator driver is the first step towards self-regulated electrical compensation of piezoelectric actuator degradation which promises increased actuator lifetime and reliable operation.
引用
收藏
页码:234 / 237
页数:4
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