Microwear properties of low energy beam irradiated magnetic layer

To form the extremely thin protective layers on Co-Cr-Ta magnetic layer send improve the microtribological properties, low energy ion and radical beams irradiation. apparatus was made fur trial, Various low energy beams produced from N-2, O-2, CF4 and C2H4 plasma were irradiated on Co-Cr-Ta magnetic media, and then the effects on microtribological properties were studied. (1) Various low energy beams irradiation increased nanoindentation hardness, Especially, nitrogen beam irradiated magnetic layered film shows the highest hardness. (2) Low energy beams irradiation from N-2, O-2, CF4 and C2H4 plasma on Co-Cr-Ta magnetic media improved microwear resistance evaluated by atomic force microscope. Fluorocarbon beam irradiation effect on microwear was remarkable. (3) Fluorocarbon and hydrocarbon films can reduce friction force and increase microwear resistance, me relationship between microwear resistance and nanoindentation hardness evaluated by atomic force microscope can reveal that fluorocarbon and hydrocarbon films show higher wear: resistance regardless of these lower nanoindentation hardness than those of modified surface due to those low friction-and hard film deposition.