共 50 条
- [2] Effect of grain width and aspect ratio on mechanical properties of Si3N4 ceramics Journal of Materials Science, 2007, 42 : 5431 - 5436
- [8] Ion and neutral transportation consideration in etching of thin Si3N4 in high aspect ratio structures for aspect ratio independent etching JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (03): : 1292 - 1296
- [10] Young's Modulus of High Aspect Ratio Si3N4 Nano-thickness Membrane 2007 7TH IEEE CONFERENCE ON NANOTECHNOLOGY, VOL 1-3, 2007, : 1071 - +