NONLINEAR DYNAMICS OF ELECTROSTATICALLY ACTUATED COUPLED MEMS PARALLEL CANTILEVER RESONATORS

被引：0

作者：

Caruntu, Dumitru I. ^{[1
]}

Taylor, Kyle N. ^{[2
]}

机构：

[1] Univ Texas Pan Amer, Dept Mech Engn, Edinburg, TX 78541 USA

[2] Univ Texas Pan Amer, Dept Elect Engn, Edinburg, TX 78541 USA

来源：

PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE 2012, VOL 1, PTS A AND B | 2012年

关键词：

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

This paper deals with the nonlinear response of a coupled cantilever system composed of two micro beams electrostatically actuated. The AC frequency of actuation is near natural frequency of the cantilevers. The two cantilevers are identical. Lagrange equations are used to develop a mathematical model of the system. These equations of motion are nondimensionalized and subjected to the method of multiple scales in order to find steady state solutions. Alternating Current (AC) and Direct Current (DC) actuation voltages are applied between the first cantilever and ground plate with DC voltage applied between the first and second cantilevers. Amplitude-frequency and phase-frequency responses of the system are provided for typical micro beam system structures.

引用

页码：897 / +

页数：2

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