Complex Refractive Index, Specific Heat Capacity, and Thermal Conductivity for Crystalline Sb-Te Alloys and ZnS-SiO2 with Various Compositions at High Temperatures

被引:7
|
作者
Kuwahara, Masashi [1 ]
Suzuki, Osamu [1 ]
Yagi, Takashi [2 ]
Taketoshi, Naoyuki [2 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Elect & Photon Res Inst, Tsukuba, Ibaraki 3058565, Japan
[2] AIST, Natl Metolor Inst Japan, Tsukuba, Ibaraki 3058563, Japan
关键词
PREMASTERED OPTICAL DISK; THIN-FILMS; DEPENDENCE;
D O I
10.7567/JJAP.52.128003
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have measured the temperature dependence of the complex refractive index, specific heat capacity, and thermal conductivity of crystalline Sb-Te alloys and ZnS-SiO2 with various compositions by using a spectroscopic ellipsometer, differential scanning calorimeter, and nanosecond pulsed light heating thermoreflectance system. The temperature range was set from room temperature to several hundred degrees Celsius. The values of these properties are useful for calculating realistic temperatures in memory devices and for designing device structures. (C) 2013 The Japan Society of Applied Physics
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页数:3
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