MicroDAC - A measurement technique for the determination of material properties at the micro- and nanoscale

被引：0
|
作者：
Keller, J
Vogel, D
Michel, B
机构：
来源：
SENSORS AND MEASURING SYSTEMS 2004 | 2004年 / 1829卷
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Recent development of new electronics and microsystem devices, including 3D-integration, ultra thin chips, polymer electronics, high temperature electronics and MEMS/NEMS packaging call for thermo-mechanical material and component characterization for reliability assessment on micro- and nanoscale. The paper presents the digital image correlation method (DIC) for deformation measurement on the micro and nanoscale based on SPM scans. Application examples are referred to in-situ thermal loading of a gas sensor and microcrack evaluation by DIC based deformation fields.
引用
收藏
页码：433 / 440
页数：8
相关论文
共 50 条
  • [1] Measurement of material properties by a modified microDAC approach
    Vogel, D
    Luczak, F
    Wittler, O
    Gollhardt, A
    Walter, H
    Michel, B
    [J]. MICRO MATERIALS, PROCEEDINGS, 2000, : 829 - 832
  • [2] Micro- and nanoscale testing of tribomechanical properties of surfaces
    Chizhik, S. A.
    Rymuza, Z.
    Chikunov, V. V.
    Kuznetsova, T. A.
    Jarzabek, D.
    [J]. RECENT ADVANCES IN MECHATRONICS, 2007, : 541 - +
  • [3] Micro-/nanoscale electroporation
    Chang, Lingqian
    Li, Lei
    Shi, Junfeng
    Sheng, Yan
    Lu, Wu
    Gallego-Perez, Daniel
    Lee, Ly James
    [J]. LAB ON A CHIP, 2016, 16 (21) : 4047 - 4062
  • [4] Micro- and macro deformation measurement by extension of correlation technique
    Anguiano-Morales, Marcelino
    Martinez, Amalia
    Garnica, Guillermo
    Rayas, J. A.
    Mendoza Santoyo, Fernando
    [J]. OPTICAL MEASUREMENT TECHNIQUES FOR STRUCTURES AND SYSTEMS, 2009, : 63 - 71
  • [5] Micro- and macro deformation measurement by extension of correlation technique
    Anguiano-Morales, Marcelino
    Martinez, Amalia
    Garnica, Guillermo
    Rayas, J. A.
    Mendoza Santoyo, Fernando
    [J]. OPTIK, 2011, 122 (18): : 1642 - 1645
  • [6] Review of Photothermal Technique for Thermal Measurement of Micro-/Nanomaterials
    Zhou, Jianjun
    Xu, Shen
    Liu, Jing
    [J]. NANOMATERIALS, 2022, 12 (11)
  • [7] Fabrication and Properties of Micro- and Nanoscale Metallic Glassy Wires: A Review
    Yi, Jun
    [J]. ADVANCED ENGINEERING MATERIALS, 2018, 20 (05)
  • [8] Making SQUIDs a practical tool for quantum detection and material characterization in the micro- and nanoscale
    Schurig, Thomas
    [J]. 27TH INTERNATIONAL CONFERENCE ON LOW TEMPERATURE PHYSICS (LT27), PTS 1-5, 2014, 568
  • [9] Scaling relationship among indentation properties of electromagnetic materials at micro- and nanoscale
    Zhou, Hao
    Zhang, Honglong
    Pei, Yongmao
    Chen, Hao-Sen
    Zhao, Hongwei
    Fang, Daining
    [J]. APPLIED PHYSICS LETTERS, 2015, 106 (08)
  • [10] Size effects in micro- and nanoscale indentation
    Manika, Eze
    Maniks, Janis
    [J]. ACTA MATERIALIA, 2006, 54 (08) : 2049 - 2056
12345