Vibration Suppression Control for Multiaxis Table Drive System

This paper presents new vibration suppression control method for multiaxis table drive system. In multiaxis table drive system, the synchronization error disturbs high precision and a fast response time to cause serious vibration. It is caused by a motion error due to a characteristics change of a table slide system. In the case of synchronization error suppression, the model of motion characteristics of a table slide system is necessary and the time delay in a servo controller has to compensate. The proposed method consists of two steps. The first step is the identification of moment of load inertia, viscous friction coefficient and coulomb friction for each axis in an independent state by offline identification method to make a table slide system. The second step is new predictive synchronization error compensation algorithm (PSEC) to reject of the transfer delay time influence of servo controller in a state with the axis interference. PSCA is designed by using synchronization torque error, velocity error and position error. The proposed method is verified by the simulations and the experimental results that PSEC is robust as compared to the without predictive function on the twin axes drive system.