Patterned multiwall carbon nanotube films as materials of NO2 gas sensors

被引：62

作者：

Cho, Woo-Sung

Moon, Seung-Il

Paek, Kyeong-Kap

Lee, Yun-Hi

Park, Jung-Ho

Ju, Byeong-Kwon

机构：

[1] Korea Univ, Dept Elect Engn, Seoul 136701, South Korea

[2] Korea Univ, Dept Phys, Seoul 136701, South Korea

[3] Daejin Univ, Dept Elect Engn, Pochon 487711, Gyeonggi Do, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2006年 / 119卷 / 01期

关键词：

diaphragm; multiwall carbon nanotubes; nitrogen dioxide (NO2); resistive gas sensor; reversible response; thermal chemical vapor deposition (CVD);

D O I：

10.1016/j.snb.2005.12.004

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Multimall carbon nanotube (MWNT) films grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm have been investigated as sensing materials of resistive gas sensors for nitrogen dioxide (NO2). We fabricated the aligned MWNT films, which grew into mesh and serpentine shapes by photolithography. Photolithography patterned the cobalt catalyst layer. MWNT films showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to NO2. The sensor exhibited a reversible response at a thermal treatment temperature of 130 degrees C for a time constant of a few minutes. The resistance change to NO2 of the mesh-shaped MWNT films was found to be larger than that of the serpentine-shaped MWNT films. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：180 / 185

页数：6

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