A new design and uncertainty budget for a metrology UHV-STM used in direct measurements of atom spacings

被引：0

作者：

Gonda, S ^{[1
]}

Zhou, H ^{[1
]}

Fu, J ^{[1
]}

Silver, RM ^{[1
]}

机构：

[1] AIST Tsukuba, Natl Metrol Inst Japan, Dimens Stand Sect, Tsukuba, Ibaraki, Japan

来源：

NANOSTRUCTURE SCIENCE, METROLOGY AND TECHNOLOGY | 2002年

关键词：

D O I：

暂无

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

A basic scheme of direct, highly accurate dimensional measurements of nanostructures is presented. We have constructed a scanning tunneling microscope (STM) unit combined with a diode laser-based Michelson interferometer module. The compact size of the STM allows it to be installed in an ultra high vacuum (UHV) chamber and is capable of measuring atomic spacings on a reconstructed single crystal surface. This method aims at direct dimensional calibration of microelectronic structures such as linewidths. and line/space features. The calibrated dimensions of these features will be traceable to the international unit of length through the He-Ne laser wavelength and be a reliable standard for next generation nanostructures and nanofabrication.

引用

页码：125 / 131

页数：7