Electrophoretic deposition of BaTiO3 based X7R dielectric film

被引：0

作者：

Zhao, JL ^{[1
]}

Wang, XH ^{[1
]}

Chen, RZ ^{[1
]}

Gui, ZL ^{[1
]}

Li, LT ^{[1
]}

机构：

[1] Tsing Hua Univ, Beijing 100084, Peoples R China

来源：

RARE METAL MATERIALS AND ENGINEERING | 2003年 / 32卷

关键词：

barium titanate; electrophoretic deposition; dielectric film; X7R;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

BaTiO3 based X7R dielectric film was fabricated on Ni electrode using electrophoretic deposition (EPD) technique in our work. Solvent kinds, different solvent ratio, electric field strength, deposition time and solid concentration in the suspension were studied with respect to their effect on density and uniformity of the dielectric film. Acetone and isopropanol with volume ration of 4:6 was optimum solvent to deposit BaTiO3 based X7R film. Suitable sintering parameters with a temperature rise rate at 60degreesC/h and a temperature decrease rate at 50degreesC/h were adopted to get uniform and dense films between 2 mu msimilar to20 mu m.

引用

页码：370 / 373

页数：4

共 9 条

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