Structural and optical properties of beta-FeSi2/Si(100) prepared by laser ablation method

被引:7
|
作者
Kakemoto, H
Makita, Y
Obara, A
Tsai, Y
Sakuragi, S
Ando, S
Tsukamoto, T
机构
关键词
D O I
10.1557/PROC-478-273
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
beta-FeSi2 is a promising material for the application of various electronic, optoelectronic and energy devices. We present here the semiconducting properties of beta-FeSi2 films on Si(100) substrate prepared by laser ablation method. Samples were grown using poly-crystalline bulk beta-FeSi2 prepared by horizontal gradient freeze method. For the monitoring of growth, in-situ observation of ablation plume was made through fluorescence spectroscopy. Reflection of high energy electron beam diffraction (RHEED) was also made in-situ to see the surface morphology. Characterization of the films by X-ray diffraction presented purely beta(220) orientation. Raman scattering measurements at room temperature also indicated that the grown films are semiconducting beta-FeSi2. Optical absorption spectra at room temperature showed absorption coefficient higher than 10(5) cm(-1) above the band-gap (similar to 1.2 eV). It was revealed that high quality semiconducting beta-FeSi2 films can be fabricated by laser ablation method without post-annealing.
引用
收藏
页码:273 / 278
页数:6
相关论文
共 50 条
  • [1] Structural and optical properties of beta-FeSi2 film prepared by laser ablation method and comparison of beta-FeSi2 films prepared by three different methods
    Kakemoto, H
    Makita, Y
    Katsumata, H
    Iida, T
    Stauter, C
    Obara, A
    Shibata, H
    Tsai, YS
    Sakuragi, S
    Kobayashi, N
    Hasegawa, M
    Uekusa, S
    Tsukamoto, T
    [J]. LASER PROCESSING OF MATERIALS AND INDUSTRIAL APPLICATIONS, 1996, 2888 : 32 - 43
  • [2] STRUCTURAL PERFECTION OF BETA-FESI2 ON SI(111)
    OCAL, C
    DEPARGA, ALV
    DELAFIGUERA, J
    PRIETO, JE
    MIRANDA, R
    [J]. DEFECT RECOGNITION AND IMAGE PROCESSING IN SEMICONDUCTORS AND DEVICES, 1994, (135): : 77 - 80
  • [3] Optical properties of beta-FeSi2 films grown on Si substrates with different degree of structural perfection
    Lange, H
    Henrion, W
    Selle, B
    Reinsperger, GU
    Oertel, G
    vonKanel, H
    [J]. APPLIED SURFACE SCIENCE, 1996, 102 : 169 - 172
  • [4] Solid phase epitaxy of beta-FeSi2 on Si(100)
    Chen, H
    Han, P
    Huang, XD
    Zheng, YD
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03): : 905 - 907
  • [5] ELECTRICAL-PROPERTIES OF BETA-FESI2/SI HETEROJUNCTIONS
    DIMITRIADIS, CA
    [J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (10) : 5423 - 5426
  • [6] HETEROEPITAXY OF BETA-FESI2 ON UNSTRAINED AND STRAINED SI(100) SURFACES
    PEALE, DR
    HAIGHT, R
    OTT, J
    [J]. APPLIED PHYSICS LETTERS, 1993, 62 (12) : 1402 - 1404
  • [7] Density functional theory studies of the optical properties of a beta-FeSi2 (100)/Si (001) interface at high pressure
    Li Haitao
    Qian Jun
    Han Fangfang
    Li Tinghui
    [J]. JOURNAL OF SEMICONDUCTORS, 2013, 34 (07)
  • [8] OPTICAL FUNCTIONS OF EPITAXIAL BETA-FESI2 ON SI(001) AND SI(111)
    BELLANI, V
    GUIZZETTI, G
    MARABELLI, F
    PATRINI, M
    LAGOMARSINO, S
    VONKANEL, H
    [J]. SOLID STATE COMMUNICATIONS, 1995, 96 (10) : 751 - 756
  • [9] The optical-electrical properties of doped beta-FeSi2
    Yan Wanjun
    Zhang Chunhong
    Zhang Zhongzheng
    Xie Quan
    Guo Benhua
    Zhou Shiyun
    [J]. JOURNAL OF SEMICONDUCTORS, 2013, 34 (10)
  • [10] Synthesis and optical properties of semiconducting beta-FeSi2 nanocrystals
    Wan, Q
    Wang, TH
    Lin, CL
    [J]. APPLIED PHYSICS LETTERS, 2003, 82 (19) : 3224 - 3226