The Control of Elastic Traveling Waves in Thin-film Free Structures

被引：0
|
作者：
Nikulin, Dmitry M. [1 ]
Chesnokov, Vladimir V. [1 ]
Chesnokov, Dmitry V. [1 ]
机构：
[1] Siberian State Geodet Acad, Novosibirsk, Russia
来源：
2009 INTERNATIONAL SCHOOL AND SEMINAR ON MODERN PROBLEMS OF NANOELECTRONICS, MICRO- AND NANOSYSTEM TECHNOLOGIES | 2009年
关键词：
Elastic waves; thin-film-free structure;
D O I：
10.1109/INTERNANO.2009.5335619
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
A converter-display device for opto-electronic imaging is considered in this work. The image scanning is carried out by modulated elastic waves traveling on a one-dimensional matrix of micromechanical strip waveguides [1]. Waveguides are formed by dividing a silicon membrane on parallel strips, which are attached to a supporting silicon frame by their ends. When individual excitating of all waveguides using the appropriate piezoelectric transducers. the surface of the display device will contain N x M relief elements, where N - number of waveguides. M - number of separated bending deformations
引用
收藏
页码：119 / 121
页数：3
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