Simple resonating microstructures for gas pressure measurement

The resonance characteristics of an oscillating microcantilever are modified due to the changing damping effects as the ambient air pressure varies, and the device is used as an absolute pressure sensor. Three variations of the microcantilever device were designed, fabricated, and tested for changes in resonant frequency, quality factor, amplitude of oscillation, and actuating current required to maintain the amplitude of oscillation constant as the ambient pressure was varied from 15 to 1450 Torr. The device has been analyzed and a relationship has been derived to aid in the prediction of device behavior. Values for precision comparable to commercial pressure sensors are also presented for each method of detection.