Optimal resources allocation for a hybrid material handling system in a 300-mm wafer fab

被引：0
|
作者：
Liu, Chih-Ming [1 ]
Kuo, Chung-Jen [1 ]
Chang, Pei-Lun [1 ]
机构：
[1] Natl Tsing Hua Univ, Dept Ind Engn & Engn Management, 101 Sect 2 Kuang Fu Rd, Hsinchu 30013, Taiwan
来源：
WODES 2006: EIGHTH INTERNATIONAL WORKSHOP ON DISCRETE EVENT SYSTEMS, PROCEEDINGS | 2006年
关键词：
hybrid material handing system; colored timed Petri nets; response surface method; optimal resources allocation;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper addresses the issue of the optimal resources allocation of automated material handling systems (AMHS) and operators for a hybrid material handing system in a 300-min wafer fab. The proposed methodology exploits the colored timed Petri nets (CTPN) to model the hybrid material handing system, and then the CTPN model is further transformed into a three-phase discrete event simulation model for the performance analysis of the system. The experiment design is conducted to simulate different scenarios and the response surface method is applied to obtain the optimal allocation of AMHSs and operators for each scenario.
引用
收藏
页码：88 / +
页数：3
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