Two-dimensional thickness measurement using acousto-optically tuned external-cavity laser diode

被引:3
|
作者
Suzuki, Takamasa [1 ]
Abe, Shingo [1 ]
Choi, Samuel [2 ]
机构
[1] Niigata Univ, Grad Sch Sci & Tech, Niigata 9502181, Japan
[2] Niigata Univ, Fac Engn, Niigata 9502181, Japan
关键词
Swept source; external-cavity laser diode; optical coherence tomography; RANGE; INTERFEROMETRY;
D O I
10.1117/12.2193027
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We propose a swept source optical coherence tomography that uses an original external-cavity laser diode and demonstrate measurements of thickness distribution in two dimensions using this equipment. We first conducted high-speed, wide-range wavelength scanning with an external-cavity laser diode that was equipped with a special antireflection-coated laser diode working at 770 nm. Using an acousto-optic deflector enabled a tuning range and rate of 22 nm and 20 kHz, respectively, with no mechanical elements. Next, we applied this source to an optical coherence tomography and measured the two-dimensional distribution of thickness of a thin glass plate.
引用
收藏
页数:8
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