STIFFNESS MASS DECOUPLED DISK RESONATOR GYROSCOPE WITH ENHANCED PERFORMANCE

被引：0
|
作者：
Zhou, Xin [1 ]
Xiao, Dingbang [1 ]
Li, Qingsong [1 ]
Xu, Yi [1 ]
Wang, Peng [1 ]
Hu, Qian [1 ]
Hou, Zhanqiang [1 ]
Wu, Yulie [1 ]
Wu, Xuezhong [1 ]
机构：
[1] Natl Univ Def Technol, Dept Mech & Elect Engn, Changsha 410073, Hunan, Peoples R China
来源：
2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2018年
基金：
中国国家自然科学基金;
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Decaying time constant tau is one of the most important metrics for high performance vibrating gyroscopes. For MEMS based gyroscopic resonators, it is preferable to simultaneously realize high quality factor (Q) and low resonant frequency f(0). In this paper, the thermo-elastic damping (TED) and f(0) of disk resonator gyroscope are manipulated by hanging lumped masses and also varying the beam width. The Q of the disk resonator has been engineered to non-TED-dominant region. Very long tau has been demonstrated. A gyroscope prototype was developed based on one of the stiffness-mass decoupled disk resonator. The prototype is operated in force-to-rebalance mode, and it shows an angle random walk (ARW) of 0.012 degrees/root h and a bias stability of 0.08 degrees/h.
引用
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页码：1020 / 1023
页数：4
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