Piezoresistance effect in n-type silicon: from bulk to nanowires

被引:4
|
作者
Kozlovskiy, S. I. [1 ]
Sharan, N. N. [1 ]
机构
[1] Natl Acad Sci Ukraine, V Lashkaryov Inst Semicond Phys, UA-03028 Kiev, Ukraine
关键词
Piezoresistance coefficients; n-Type silicon; Bulk material; Quantum film; Quantum wire; DIMENSIONAL ELECTRON-GAS; DIELECTRIC FORMALISM; SURFACE-ROUGHNESS; LIMITED MOBILITY; BAND-STRUCTURE; THIN-WIRE; TRANSPORT; SEMICONDUCTOR; SI;
D O I
10.1007/s10825-014-0563-2
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The first order piezoresistance coefficients are examined in the n-type silicon structures with different dimensionality of electron gas: bulk crystal, quantum film (well) and quantum wire. The detail research involves quantum kinetic approach to calculation of the kinetic coefficients (conductivity, mobility, concentration) of electrons in the strained and unstrained states. As scattering system were adopted ionized impurities, longitudinal acoustic phonons and surface roughness. Detailed studies have been carried out for dependences of electron mobility and piezoresistance coefficients on confining dimensions. An alternative explanation is proposed for origin of the giant piezoresistance effect in n-type silicon nanostructures. Comparison of the obtained results shows not only qualitative but even sufficient quantitative agreement with experimental data.
引用
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页码:515 / 528
页数:14
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