Simulations, fabrication, and characterization of diamond-coated Love wave-type surface acoustic wave sensors

被引：4

作者：

Talbi, A. ^{[1
]}

Soltani, A. ^{[1
]}

Rumeau, A. ^{[2
,3
]}

Taylor, A. ^{[4
,5
]}

Drbohlavova, L. ^{[5
]}

Klimsa, L. ^{[4
]}

Kopecek, J. ^{[4
]}

Fekete, L. ^{[4
]}

Krecmarova, M. ^{[4
,5
]}

Mortet, V. ^{[4
,5
]}

机构：

[1] USTL, EC Lille, IEMN UMR CNRS 8520, LIA LEMAC LICS,Joint Int Lab, Villeneuve Dascq, France

[2] Lab Anal & Architecture Syst, Toulouse, France

[3] Univ Toulouse, LAAS, Toulouse, France

[4] Acad Sci Czech Republic, Inst Phys, Vvi, Prague 8, Czech Republic

[5] Czech Tech Univ, Fac Biomed Engn, Kladno, Czech Republic

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2015年 / 212卷 / 11期

关键词：

acoustic sensors; chemical vapor deposition; diamond; nanocrystalline materials; quartz; surface acoustic waves;

D O I：

10.1002/pssa.201532188

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond is an attractive material for biosensing applications due its chemical stability and biocompatibility and the recent development of various covalent attachment schemes for biomolecules. Acoustic sensors are highly sensitive with the capability to detect minute mass variation by monitoring changes in their electro-mechanical resonance frequency. Quartz crystal microbalance (QCM) sensors are the simplest that can operate in liquids but in comparison, Love wave sensors are more sensitive acoustic detectors in comparison. In this work, we present both theoretical and experimental study of Love wave-type surface acoustic wave (SAW) devices on AT quartz crystals substrates coated with diamond at low temperature for biosensing applications. (C) 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页码：2606 / 2610

页数：5

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