共 50 条
- [1] Microstructure of a Damascene sabre after annealing [J]. Int. J. Mater. Res., 2006, 8 (1172-1182):
- [3] Textural evolution of Cu damascene interconnects after annealing [J]. MATERIALS, TECHNOLOGY AND RELIABILITY FOR ADVANCED INTERCONNECTS AND LOW-K DIELECTRICS-2004, 2004, 812 : 391 - 396
- [4] Textural and microstructural transformation of Cu damascene interconnects after annealing [J]. Journal of Electronic Materials, 2005, 34 : 506 - 514
- [6] Microstructure of a genuine Damascus sabre [J]. CRYSTAL RESEARCH AND TECHNOLOGY, 2005, 40 (09) : 905 - 916
- [8] Microstructure and electromigration in copper damascene lines [J]. 1999 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 37TH ANNUAL, 1999, : 263 - 269
- [9] Annealing impact on damascene Cu resistivity and microstructures [J]. SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 400 - 404