Study of thermal diffusivity measurement of CVD diamond

被引:0
|
作者
Gu, YQ [1 ]
Yu, LX [1 ]
机构
[1] TSING HUA UNIV,DEPT ENGN MECH,BEIJING 100084,PEOPLES R CHINA
来源
DIAMOND FILMS AND TECHNOLOGY | 1996年 / 6卷 / 01期
关键词
ac calorimetric method; CVD diamond film; thermal diffusivity;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thermal diffusivity of free-standing PCVD diamond films has been measured by ac calorimetric method at various methane concentrations. Thermal diffusivity as a function of sample thickness and temperature has also been obtained. Thermal conductivity is calculated by multiplying thermal diffusivity with heat capacity per unit volume adopted from literature. Systematic errors such as heat loss, non-one-dimensional heat conduction and edge reflection effect are considered. For the diamond sample, the edge reflection effect is not negligible and is analytically corrected.
引用
收藏
页码:23 / 30
页数:8
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