Local kinetic analysis of the electron temperature gradient (ETG) mode in Tokamaks indicates that the effects of charge non-neutrality are significant in the parameter regime of Tokamaks. The maximum growth rate occurs at (k/k(De))(2) 0.5 when the electron temperature and density are varied over a wide range. The growth rate becomes dependent on the beta factor even though the ETG mode is predominantly electrostatic. Finite beta stabilization of the ETG mode requires a large ballooning parameter so as to cause an effective drift reversal. Mixing length estimate yields an electron thermal diffusivity chi(e) qnu(Te) (c/omega(pe))(2) rootbeta(e) / L-n where c/omega(pe) is the electron skin depth.