Strength measurement of thin lubricating films

被引:19
|
作者
Wang, LY
Yin, ZF
Zhang, J
Chen, CI
Hsu, S
机构
[1] HMT Technol, Fremont, CA 94538 USA
[2] NIST, Div Ceram, Gaithersburg, MD 20899 USA
关键词
film-failure; film; shear stress; scratch; strength; lubrication; measurement;
D O I
10.1016/S0043-1648(99)00312-9
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
A new method has been developed to measure the film-failure maximum shear stress at surface tau(sm) of thin films in sliding. A ball-on-inclined plane scratch test was employed in these measurements. The tested balls were 52100 steel and the tested plane samples were 52100 steel, sapphire and a silicon wafer. Films on the plane samples were dip-coated to different thickness (0.5-200 nm). Paraffin, oleyl alcohol, octadecanol, octadecamide, n-octadecyl mercaptan, 1,2-octadecanediol, octadecylamine, oleic acid, stearic acid, ZDDP, etc. were used to deposit different films. The test results indicate that the film-failure maximum shear stress at surface tau(sm) increases with an increase of film thickness. Roughness and substrate differences are also found to have an influence on the measured tau(sm). A smoother surface gives higher tau(sm). Among the studied films, stearic acid possesses the highest tau(sm) while octadecanol has the lowest. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:155 / 162
页数:8
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