Electronic sputtering of thin lithium fluoride films induced by swift heavy ions

被引:8
|
作者
Martinez, R. [1 ,2 ]
Langlinay, Th [1 ]
Boduch, P. [1 ]
Cassimi, A. [1 ]
Hijazi, H. [1 ]
Ropars, F. [1 ]
Salou, P. [1 ,4 ]
da Silveira, E. F. [3 ]
Rothard, H. [1 ]
机构
[1] Univ Caen, Normandie UCBN, ENSICAEN,CNRS, Ctr Rech Ions Mat & Photon,CIMAP,CIRIL,CEA,CIRIL, BP 5133,Blvd Henri Becquerel, F-14070 Caen 05, France
[2] Univ Fed Amapa, Dept Phys, Rod JK Km 02,Jardim Marco Zero, BR-22453900 Amapa, Brazil
[3] Pontificia Univ Catolica Rio de Janeiro PUC Rio, Dept Phys, Rua Marques Sao Vicente 225, BR-22453900 Rio De Janeiro, Brazil
[4] PANTECHNIK, 13 Rue Resistance, F-14400 Bayeux, France
关键词
cluster formation and stability; sputtering; thin films; lithium fluoride; swift heavy ions; highly charged ions; LANGMUIR-BLODGETT-FILMS; SHOCK-WAVE MECHANISM; EMISSION; DESORPTION; SIZE; LIF; DISTRIBUTIONS; INSULATORS; SOLIDS; ENERGY;
D O I
10.1088/2053-1591/2/7/076403
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The sputtering of secondary ions from thin lithium fluoride films of different thickness (2 nm <= z <= 106 nm) irradiated by swift heavy ions (Ni and Ge:similar to 10 MeV/u) was studied under ultrahigh-vacuum conditions by a time-of-flight imaging technique (XY-TOF-SIMS). Most of the positive ions emitted are (LiF)(n)Li (+) clusters. Cluster structure and stability (magic numbers) are analyzed. A pronounced dependence of sputtered particle yields on the film thickness z was observed. The onset of large cluster emission occurs at a thickness of about z = 20 nm. For thinner films, z= 2 and z = 4 nm, only small clusters (n < 6) are ejected. Athreshold for the emission of large clusters was also observed as a function of the electronic stopping power S-e at around 6 keV nm(-1). This leads to the important conclusion that both a sufficient amount of material (z-dependence) and of deposited energy (S-e-dependence) are needed for large ionic cluster emission to occur.
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页数:9
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