共 50 条
- [7] Characterization of ultrathin SiO2 films grown by rapid thermal oxidation JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03): : 1394 - 1398
- [8] HYDROGEN PERMEABILITY IN THERMALLY GROWN FILMS OF SIO2 ON SILICON SUBSTRATES PHYSICAL REVIEW B, 1993, 47 (07): : 4115 - 4118
- [9] Low-temperature deposition of ultrathin SiO2 films on Si substrates 18TH INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES (VEIT2013), 2014, 514