Terahertz Sensing of Thin Poly(ethylene Terephthalate) Film Thickness Using a Metallic Mesh

被引:27
|
作者
Yoshida, Shigeki [1 ]
Kato, Eiji [1 ,2 ]
Suizu, Koji [1 ]
Nakagomi, Yoichi [1 ]
Ogawa, Yuichi [3 ]
Kawase, Kodo [1 ,3 ,4 ]
机构
[1] Nagoya Univ, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[2] Advantest Labs Ltd, Aoba Ku, Sendai, Miyagi 9893124, Japan
[3] Tohoku Univ, Aoba Ku, Sendai, Miyagi 9818555, Japan
[4] RIKEN, Aoba Ku, Sendai, Miyagi 9800845, Japan
关键词
SUBWAVELENGTH HOLE ARRAYS; TRANSMISSION CHARACTERISTICS;
D O I
10.1143/APEX.2.012301
中图分类号
O59 [应用物理学];
学科分类号
摘要
A metallic mesh, i.e., a metallic thin film with regularly spaced openings, works as a band-pass filter in the terahertz region. The filter's transmittance is far higher than the open-area ratio and its transmission spectrum is affected by the index of refraction in and above the openings. Therefore, metallic-mesh films can be used as high-sensitivity sensing or imaging conduits if samples adhere to the metal surface. Here, we report on our success in detecting 1-mu m-thickness differences in poly(ethylene terephthalate) (PET) films and recording two-dimensional (2D) images using metallic-mesh sensing and imaging applications. (C) 2009 The Japan Society of Applied Physics
引用
收藏
页码:0123011 / 0123013
页数:3
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