[1] Dalian Univ Technol, Key Lab Liaoning IC Technol, Sch Microelect, Dalian 116024, Peoples R China
[2] Hainan Univ, Coll Mat & Chem Engn, State Key Lab Marine Resource Utilizat South Chin, Haikou 570228, Hainan, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai 200050, Peoples R China
[4] Moscow MV Lomonosov State Univ, Chem Dept, Lab Chem & Phys Semicond & Sensor Mat, Moscow 199991, Russia