Single-mode VCSELs

被引:29
|
作者
Unold, HJ [1 ]
Mahmoud, SWZ [1 ]
Jäger, R [1 ]
Golling, M [1 ]
Kicherer, M [1 ]
Mederer, F [1 ]
Riedl, MC [1 ]
Knödl, T [1 ]
Miller, M [1 ]
Michalzik, R [1 ]
Ebeling, KJ [1 ]
机构
[1] Univ Ulm, Optoelect Dept, D-89081 Ulm, Germany
关键词
VCSEL; single-mode; low divergence; polarization; long monolithic cavity; shallow surface etch; photonic crystal;
D O I
10.1117/12.469237
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We compare various approaches aiming at large-area high-power single-mode oxidized VCSELs. Stable and reproducible single-mode emission with SMSR (side-mode suppression ratio) greater than 30 dB and output powers well above 5 mW are reported for the long monolithic cavity and self-aligned shallow surface etching approaches, both of which are suitable for commercial production. Additionally, Photonic Crystal Surface-Emitting Lasers (PCSELs) are introduced, which enable advanced mode control by novel transverse optical guiding techniques.
引用
收藏
页码:218 / 229
页数:12
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