Surface acoustic wave linear motor

被引：0
|
作者：
Kurosawa, MK [1 ]
机构：
[1] Tokyo Inst Technol, Dept Adv Appl Elect, Interdisciplinary Grad Sch Sci & Engn, Midori Ku, Yokohama, Kanagawa 2268502, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2002年 / 47卷 / 09期
关键词：
friction drive; micro actuator; linear motor; ultrasonic motor; nono stepping motion; surface acoustic wave; MEMS; Piezo actuator;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：681 / 686
页数：6
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