Three-dimensional photonic crystals

被引:3
|
作者
Meisel, DC [1 ]
Deubel, M
Hermatschweiler, M
Busch, K
Koch, W
von Freymann, G
Blanco, A
Enkrich, C
Wegener, M
机构
[1] Forschungszentrum Karlsruhe, Inst Nanotechnol, Helmholtz Gemeinschaft, D-76021 Karlsruhe, Germany
[2] Univ Karlsruhe, Inst Angew Phys, TH, D-76128 Karlsruhe, Germany
[3] Univ Karlsruhe, Inst Theorie Kondensierten Mat, TH, D-76128 Karlsruhe, Germany
关键词
Photonic Crystal; laser direct writing; holographic lithography;
D O I
10.4028/www.scientific.net/SSP.99-100.55
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We review our work on two complementary and compatible techniques, namely direct laser writing and holographic lithography which are suitable for fabricating three-dimensional Photonic Crystal templates for the visible and near-infrared. The structures are characterized by electron micrographs and by optical spectroscopy, revealing their high optical quality.
引用
收藏
页码:55 / 64
页数:10
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