Nano-Sized and Periodic Structures Generated by Interfering Femtosecond Laser

被引:8
|
作者
Nakata, Yoshiki [1 ]
Tsuchida, Kunio [1 ]
Miyanaga, Noriaki [1 ]
Okada, Tatsuo [2 ]
机构
[1] Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan
[2] Kyushu Univ, Grad Sch Informat Sci & Elect Engn, Nishi Ku, Fukuoka 8190395, Japan
来源
基金
日本科学技术振兴机构;
关键词
Interfering femtosecond laser; nanocrown; polymer nanobump; photo mask; bimetallic nanobelt; dual periodic structure;
D O I
10.2961/jlmn.2008.02.0001
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Top down technique of interfering femtosecond laser processing was applied to generate new nanomaterials such as nanocrown, nanomesh, nanobelt, and dual periodic structure. In the case of nanocrown, whiskers are standing at the edge of a nanohole. The width of a whisker was just 80 nm. A nanohole array structure generated by interfering 4 beams was applied to a spatial filter as a base material for the growth of photo-polymerizing polymer, and polymer nanobump array was generated. Dual periodic structures were generated by multiple shots, and bimetallic nanobelt was generated from bilayer thin film. Processing of fiber film was tested.
引用
收藏
页码:63 / 66
页数:4
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