Implementation principles for the procedure of extraction of convective currents in a dielectric and emission currents at semiconductor-dielectric interface from the dynamic current-voltage characteristics of a metal-insulator-semiconductor structure: A method for checking variations in interface states in the course of an experiment

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作者
Dmitriev, SG
Markin, YV
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
摘要
The possibility of extracting convective currents in a dielectric (I-d) and emission currents at a semiconductor-dielectric interface (I-e) from dynamic current-voltage (I-V) characteristics of a metal-insulator-semiconductor (MIS) structure is considered. A method for controlling variations in interface states is proposed based on synchronous measurements of the high- and low-frequency capacitance-voltage (C-V) of the structure under study.
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页码:922 / 926
页数:5
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