Scanning Laser Doppler Vibrometer for vibrational analysis of Micro-Electro-Mechanical-Systems (MEMS)

Micro-Electro-Mechanical Systems (MEMS) are miniaturized devices combining together electrical and mechanical functionalities. MEMS is one of the most promising technology in the scientific and industrial field, thanks to the possibility of integration of sensors, transducers and electronic, in the same die. Nevertheless, the spread of the micro-electro mechanical systems (MEMS) market is strictly related to the development of manufacturing technologies and to the implementation of analysis and diagnostic technique that allow to increase performances and reliability. The Laser Doppler Vibrometry is a valuable technique for measurement in the microscale thanks to his non-contact nature and to the possibility to position the laser beam in every point on the object surface.