Top-down design of MEMS

被引：0
|
作者：
Fedder, GK [1 ]
机构：
[1] Carnegie Mellon Univ, Inst Robot, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA
来源：
2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS | 2000年
关键词：
MEMS CAD; MEMS design methodology;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS hierarchical circuit representation and mapping of process, materials properties, design rules, and parasitic parameters into appropriate technology files.
引用
收藏
页码：7 / 10
页数：4
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