Development of Detection Techniques of Surface Defects for Large Aperture Optical Elements Based on Machine Vision

被引:0
|
作者
Tao Xian [1 ]
Zhang Zheng-tao [1 ]
Zhang Feng [1 ]
Shi ya-li [1 ]
Xu De [1 ]
机构
[1] Chinese Acad Sci, Res Ctr Precis Sensing & Control, Inst Automat, Beijing 100190, Peoples R China
关键词
Large aperture optics; machine vision; dark field imaging; damage detection;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper describes the status of research and development related to large-aperture optics surface damage detection based on machine vision, which is divided into online and offline systems under dark field imaging mode. The key issues about efficiency, size scaling, sub-image mosaic and adaptability are emphatically discussed in the existence of the detection system. Aiming at those existing problems, this paper outlines a prospect of the development and direction for large-aperture optical element surface damage detection.
引用
收藏
页码:2935 / 2940
页数:6
相关论文
共 11 条
  • [1] [Anonymous], P SPIE
  • [2] Bilmes G M, 2005, P SOC PHOTO-OPT INS, P980
  • [3] NIF optical materials and fabrication technologies: An overview
    Campbell, JH
    Hawley-Fedder, RA
    Stolz, CJ
    Menapace, JA
    Borden, MR
    Whitman, PK
    Yu, J
    Runkel, M
    Riley, MO
    Feit, MD
    Hackel, RP
    [J]. OPTICAL ENGINEERING AT THE LAWRENCE LIVERMORE NATIONAL LABORATORY II: THE NATIONAL IGNITION FACILITY, 2004, 5341 : 84 - 101
  • [4] Conder A, 2007, P SOC PHOTO-OPT INS
  • [5] Hogue P, 2004, P SOC PHOTO-OPT INS, V5526, P157
  • [6] Lorincik J, 1997, P SOC PHOTO-OPT INS, P302
  • [7] Prasad R R, 2005, P SOC PHOTO-OPT INS, P421
  • [8] Stolz C J, 2008, P SOC PHOTO-OPT INS
  • [9] Optics damage inspection for the NIF
    Thompson, CE
    Knopp, CF
    Decker, DE
    [J]. THIRD INTERNATIONAL CONFERENCE ON SOLID STATE LASERS FOR APPLICATION TO INERTIAL CONFINEMENT FUSION, PTS 1 AND 2, 1999, 3492 : 921 - 932
  • [10] Wang F., 2006, PROC SPIE