Preparation of nanosized titania thick and thin films as gas-sensors

被引：77
|
作者：
Guidi, V
Carotta, MC
Ferroni, M
Martinelli, G
Paglialonga, L
Comini, E
Sberveglieri, G
机构：
[1] Dipartimento Fis, I-44100 Ferrara, Italy
[2] INFM, I-44100 Ferrara, Italy
[3] Dipartimento Chim & Fis Mat, I-25133 Brescia, Italy
[4] INFM, I-25133 Brescia, Italy
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1999年 / 57卷 / 1-3期
关键词：
gas sensors; titania; thin films; thick films;
D O I：
10.1016/S0925-4005(99)00080-5
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Nanosized titania thick and thin films were produced and shown to possess sensing capability. Correlation between electrical performance and structural features is inferred, with particular emphasis to the role played by the grain size. The nanostructured nature of the layers allows the films to be operated within a remarkably lower temperature range (350-800 degrees C) with respect to previously existing titania bulk sensors. The films are sensitive to CO and NO2. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：197 / 200
页数：4
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