Low-loss optical waveguides written by femtosecond laser pulses for three-dimensional photonic devices

被引：21

作者：

Fukuda, T ^{[1
]}

Ishikawa, S ^{[1
]}

Fujii, T ^{[1
]}

Sakuma, K ^{[1
]}

Hosoya, H ^{[1
]}

机构：

[1] Fujikura Ltd, Opt & Elect Lab, Sakura, Chiba 2858550, Japan

来源：

PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS III | 2004年 / 5339卷

关键词：

laser microfabrication; ultrafast lasers; multiphoton process; integrated optical devices; glass and other amorphous materials;

D O I：

10.1117/12.528689

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Femtosecond laser microfabrication attracts much attention due to its ability to write three-dimensional photonic devices into various transparent materials. By optimizing laser processing parameters and annealing at high temperature, low-loss straight optical waveguides are written in a pure silica glass. The minimum propagation-loss is 0.05 dB/cm at the wavelength of 1550 nm. The utility of the femtosecond laser processing is demonstrated by writing a low-loss three-dimensional 1x8 optical splitter.

引用

页码：524 / 538

页数：15

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