A microwave probe nanostructure for atomic force microscopy

被引：12

作者：

Ju, Y. ^{[1
]}

Hamada, M. ^{[1
]}

Kobayashi, T. ^{[2
]}

Soyama, H. ^{[2
]}

机构：

[1] Nagoya Univ, Dept Engn Sci & Mech, Grad Sch Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

[2] Tohoku Univ, Dept Nanomech, Grad Sch Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2009年 / 15卷 / 08期

基金：

日本学术振兴会;

关键词：

MILLIMETER-WAVES;

D O I：

10.1007/s00542-009-0782-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An atomic force microscope (AFM) probe on a GaAs wafer was studied as a new microwave probe structure. A waveguide was created by evaporating an Au film on the top and bottom surfaces of the GaAs AFM probe. The fabricated AMF probe's tip is 8 mu m long and has a radius of curvature of about 50 nm. The open structure of the waveguide at the tip of the probe was generated by using focused ion beam (FIB) fabrication. AFM topography of a grating sample was created by using the fabricated microwave AFM probe. The fabricated probe exhibits nanometer-scale resolution, and microwave emission was successfully detected at the tip of the probe by approaching Cr-V steel and Au wire samples.

引用

页码：1195 / 1199

页数：5

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